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Vacuum pump(100v) - List of Manufacturers, Suppliers, Companies and Products

Vacuum pump Product List

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Abnormal Discharge Prevention Unit A2K Series

Abnormal Discharge Prevention Unit A2K Series

High throughput! Large capacity is possible with master-slave connections. [ULVAC]

The A2K series is an abnormal discharge prevention unit that applies a positive voltage pulse to a DC power supply in a reactive sputtering process to neutralize the charge on the target. By reducing abnormal discharges, it enables high power input. The A2K-20K and 40K can be operated in parallel with up to six units each. It is possible to synchronize the output pulses of multiple A2K units. It can be easily installed on existing equipment, achieving improved yield and throughput at a low cost. 【Features】 ○ High throughput ○ Reduced substrate damage ○ Suppressed substrate temperature ○ Simple connectivity ○ Adjustable reverse pulse frequency For more details, please contact us or download the catalog.

  • Power Supplies

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G-TRAN Series 4 Channel Display Unit IM1R1

G-TRAN Series 4 Channel Display Unit IM1R1

Up to 4 measurement units can be connected, allowing simultaneous measurement and display. 【ULVAC】

The 4-channel display unit can connect up to 4 measurement units, allowing simultaneous measurement and display. It comes standard with 8-point setpoint output and I/O communication control functions. With the linkage function between the atmospheric pressure Pirani gauge or the Pirani gauge and the ion gauge, it enables easy measurement of a wide range of pressures. 【Features】 ○ Adopts 96mm DIN size ○ Input voltage can be selected from DC24V or AC100V ○ Capable of connecting up to 4 measurement units ○ Simultaneous measurement and output for each sensor (CH1-4) ○ Linked measurement possible between IG (CH1) and PG (CH2) For more details, please contact us or download the catalog.

  • Other measurement, recording and measuring instruments

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G-TRAN 1 Channel Display Unit ISG1

G-TRAN 1 Channel Display Unit ISG1

Pressure measurement display, pressure contact settings, and various operations can be easily performed, and the operating status is immediately clear. 【ULVAC】

This display is a 1-channel display compatible with the entire G-TRAN series and the CCM series. By connecting it to a measurement unit, pressure readings, pressure contact settings, and various operations can be easily performed, and the operational status can be understood at a glance. Control and measurement via remote operation are possible through the display unit. 【Features】 ○ 0-10V linear output ○ Setpoint output (3 points) ○ Input voltage is DC24V ○ Display section features easy-to-read LED ○ Compliant with CE standards For more details, please contact us or download the catalog.

  • Other measurement, recording and measuring instruments

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Optical Process Monitor Optius

Optical Process Monitor Optius

You can monitor the status of various plasma processes in real time. 【ULVAC】

The optical process monitor Optius can monitor the status of various plasma processes in real-time by measuring the emission spectrum of the plasma. It is ideal for MFC control in reactive sputtering and endpoint detection in etching. 【Specifications】 ○ Weight: Main unit (TSC): 4.9kg Expansion unit (ESC, 1ch): 1.3kg ○ Power supply: AC100–240V (50/60Hz) ○ Power consumption: 100W (when using 5 channels) ○ Operating environment: Temperature: 10 – 40°C, Humidity: 15 – 80% RH (without condensation) For more details, please contact us or download the catalog.

  • Other measurement, recording and measuring instruments
  • Other process controls

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Oil Rotary Vacuum Pump VD Series Ver.C

Oil Rotary Vacuum Pump VD Series Ver.C

Adopted forced oil supply method! This is a vacuum pump that can be used for a wide range of applications. [ULVAC]

The VD Series Ver.C is an oil-sealed rotary vacuum pump equipped with ULVAC's original high-efficiency (IE3) multi-voltage motor. It features a two-stage vane design that achieves excellent ultimate pressure and has been optimized for low noise, making it suitable for a wide range of applications. One motor can accommodate a wide voltage range from 200-240V to 380-460V. The pump maintains stable exhaust speed even near atmospheric pressure, making it ideal for repeated continuous operation between atmospheric and vacuum conditions. 【Features】 ○ Equipped with ULVAC's original high-efficiency (IE3) multi-voltage motor ○ One motor can accommodate a wide voltage range ○ Utilizes a forced lubrication system ○ Stable exhaust speed even near atmospheric pressure ○ Options available for special applications → In addition to the standard model, three variants (A specification, B specification, H specification) are available for special applications. For more details, please contact us or download the catalog.

  • Vacuum pump

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Crystal Oscillator Film Deposition Controller CRTM-9100G

Crystal Oscillator Film Deposition Controller CRTM-9100G

Quartz oscillator film deposition controller with low-rate deposition control and high-precision film thickness control [ULVAC].

The CRTM-9100G is a quartz crystal oscillator-based film deposition controller developed with the concept of balancing low cost and high functionality. It incorporates all the technologies that Ulvac has cultivated over many years as a manufacturer of quartz crystal oscillator-based film deposition controllers, including continuous deposition of multilayer films, simultaneous deposition control of up to four components, and low rate control. It can be utilized for a long time in various deposition processes. 【Specifications】 ○Dimensions: W×D×H 480mm×350mm×149mm ○Weight: Approximately 8kg ○Utility: AC 85 – 230V 50/60Hz ○Power Consumption: 60W Max ○Operating Environment: Temperature: 5 – 40℃, Humidity: 5 – 95% RH (without condensation) For more details, please contact us or download the catalog.

  • Other measurement, recording and measuring instruments
  • Coating thickness gauge

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